GLR series
Negative-tone resist for photo spacer
Feature
■ High sensitivity：≧ 50 mJ/cm2
■ Good patterning uniformity：4～20 μm
■ High elastic recovery ratio：≧ 85%
■ High transmittance：≧ 95%
■ Excellent chemical stability
■ Robust to repeated pressing
Product variation
Applicable to various pattern sizes and exposure conditions
Product series |
GLR series |
|||
|---|---|---|---|---|
Type |
Normal type |
High resolution type |
||
Exposure type (g, h, i –line) |
Proximity |
Proximity |
Projection |
|
Physical Properties |
Heating residue |
10~35% |
10~35% |
15~25% |
Viscosity |
3~7 mPa･s |
3~7 mPa･s |
3~7 mPa･s |
|
Thickness |
1~4 μm |
1~4 μm |
1~4 μm |
|
Pattern size |
≧ 15 μm |
7~15 μm |
4~12 μm |
|
Taper angle |
30~70° |
30~90° |
70~90° |
|
Optical Properties (Transmittance) |
@460nm |
≧ 95% |
≧ 95% |
≧ 95% |
@540nm |
≧ 95% |
≧ 95% |
≧ 95% |
|
Mechanical Properties |
Recovery ratio (on Glass) |
90~95% |
85~90% |
85~90% |
Pencil Hardness (JIS K 5600) |
4~8H |
4~8H |
4~8H |
|
Electrical Properties |
Dielectric Constant |
4~5 |
4~5 |
4~5 |
Voltage Holding Ratio |
≧ 99% |
≧ 99% |
≧ 99% |
|
Chemical stability (IPA, EtOH, 5%NaOHaq, 5%H2SO4aq) |
No Change |
No Change |
No Change |
|
Normal type
High resolution type
Please feel free to consult with us. We propose products and technologies matched to customers' needs.
- Inquiries about display materials
Head Office (Electronics Materials Sales Department Division Ⅰ)
TEL +81-6-6264-5072
9:00~18:00 (exc. weekends and public holidays) - Inquiries about semiconductor materials
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TEL +81-3-6202-7078
9:00~18:00 (exc. weekends and public holidays) - Inquiries by form
