GLR series

Negative-tone resist for photo spacer

Feature

■ High sensitivity：≧ 50 mJ/cm²
■ Good patterning uniformity：4～20 μm
■ High elastic recovery ratio：≧ 85%

■ High transmittance：≧ 95%
■ Excellent chemical stability
■ Robust to repeated pressing

Applicable to various pattern sizes　and exposure conditions

Product series		GLR series
Type		Normal type	High resolution type
Exposure type (g, h, i –line)		Proximity	Proximity	Projection
Physical Properties	Heating residue	10~35%	10~35%	15~25%
	Viscosity	3~7 mPa･s	3~7 mPa･s	3~7 mPa･s
	Thickness	1~4 μm	1~4 μm	1~4 μm
	Pattern size	≧ 15 μm	7~15 μm	4~12 μm
	Taper angle	30~70°	30~90°	70~90°
Optical Properties (Transmittance)	@460nm	≧ 95%	≧ 95%	≧ 95%
Optical Properties (Transmittance)	@540nm	≧ 95%	≧ 95%	≧ 95%
Mechanical Properties	Recovery ratio (on Glass)	90~95%	85~90%	85~90%
Mechanical Properties	Pencil Hardness (JIS K 5600)	4~8H	4~8H	4~8H
Electrical Properties	Dielectric Constant	4~5	4~5	4~5
Electrical Properties	Voltage Holding Ratio	≧ 99%	≧ 99%	≧ 99%
Chemical stability (IPA, EtOH, 5%NaOHaq, 5%H₂SO₄aq)		No Change	No Change	No Change

Inquiries about display materials
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TEL +81-3-6202-7078
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