CHN series

Negative-tone resist for overcoat

Feature

■ High sensitivity：≧ 50 mJ/cm²
■ High transmittance：≧ 99% (at 380~780 nm)
■ Low curing temperature：≧ 100℃
■ Constant temperature and humidity resistance：
85℃/85%RH, 100 V, Ag or Cu substrate,240 hr No change in the resistance value

■ High flatness
■ Good adhesion
■ High chemical stability

Product variation

Applicable to various pattern sizes　and exposure conditions

Product series		CHN series
Type		Normal type (≧ 200℃ cure)	Low temp. cure type (≧ 100℃ cure)
Exposure type (g, h, i –line)		Proximity	Proximity	Projection
Physical Properties	Viscosity	3~7 mPa･s	3~7 mPa･s	3~7 mPa･s
	Thickness	2~3 μm	1.5~4 μm	1.5~4 μm
	Pattern size	≧ 25 μm	≧ 25 μm	≧ 5 μm
	Taper angle (Angle from substrate)	20~60°	15~40°	50~80°
Optical Properties (Transmittance)	Ave.@380~780nm	≧ 99%	≧ 99%	≧ 99%
Optical Properties (Transmittance)	@400nm	≧ 97%	≧ 97%	≧ 97%
Mechanical Properties	Pencil Hardness (JIS K 5600)	H	5~3B	5~3B
Electrical Properties	Dielectric Constant	4~4.5	3.5~4	3.5~4
Electrical Properties	Surface Resistivity	≧ 1ｘ10¹⁴ Ω/□	≧ 1ｘ10¹⁴ Ω/□	≧ 1ｘ10¹⁴ Ω/□
Adhesion (on Glass, PET, COP, ITO, MAM)		100 / 100 (5B)	100 / 100 (5B)	100 / 100 (5B)
Chemical stability (IPA, EtOH, 2.38%TMAHaq, 5%NaOHaq, 5%H₂SO₄aq)		No Change	No Change	No Change

Island pattern

Hole pattern

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