PML series
Negative-tone resist for micro lens
Feature
■ High photo-sensitivity：≧ 50 mJ/cm2
■ High transmittance：≧ 97% (Ave. @380~780 nm)
■ Good patterning uniformity：10～50 μm
Product variation
Product series |
PML series |
|||
|---|---|---|---|---|
Type |
Normal type |
High resolution type |
||
Exposure type (g, h, i -line) |
Proximity |
Projection |
Projection |
|
Physical Properties |
Heating residue |
30~50% |
30~50% |
30~50% |
Viscosity |
20~40 mPa･s |
20~40 mPa･s |
20~40 mPa･s |
|
Thickness |
5~10 μm |
5~10 μm |
5~10 μm |
|
Pattern size |
20~50 μm |
20~50 μm |
10~20 μm |
|
Optical Properties |
Transmittance @460nm |
≧ 95% |
≧ 95% |
≧ 95% |
Transmittance @540nm |
≧ 95% |
≧ 95% |
≧ 95% |
|
Refractive index @594nm |
1.58~1.60 |
1.58~1.60 |
1.54~1.56 |
|
Normal type
High resolution type
Please feel free to consult with us. We propose products and technologies matched to customers' needs.
- Inquiries about display materials
Head Office (Electronics Materials Sales Department Division Ⅰ)
TEL +81-6-6264-5072
9:00~18:00 (exc. weekends and public holidays) - Inquiries about semiconductor materials
Tokyo Office (Electronics Materials Sales Department Division Ⅱ)
TEL +81-3-6202-7078
9:00~18:00 (exc. weekends and public holidays) - Inquiries by form
